Porous ceramic chuck table used in semiconductor equipment

By -
Source: https://www.innovacera.com/news/ceramic-chuck-table.html
Porous ceramic chuck table

Porous ceramic chuck table is a so important part in semiconductor equipment such as silicon wafer processing.

Porous Ceramic Chuck Tables are widely used as important components of equipment in silicon wafer, semiconductor compound wafer, piezoelectric ceramic, glass, LED, semiconductor package component substrate, optical component thinning, cutting and so on.

The advantages include the following:
  • Strong permeability: Uniform air permeability and water permeability to ensure the uniform stress and firm adsorption of the silicon wafer, so that it does not slip during the grinding process.

  • Compact and uniform structure: Due to the dense and uniform microporous ceramic, the chuck table is not easy to adsorb silicon powder abrasives and is easy to clean.

  • High strength: No deformation during grinding, to ensure that the silicon wafer is uniformly stressed at all points during grinding, and is not easy to edge breakage and debris.

  • Long service life: The surface shape is good, the dressing cycle is long and the dressing amount is small, so it has a long service life.

  • Easy to repair: There are no cracks, chips, threshing during machining.

Comments

Post a Comment

Popular posts from this blog

Silicon Nitride Heater

By -
Image
Source: https://www.innovacera.com/news/silicon-nitride-ceramic-heater.html Silicon Nitride Heater has the properties of high-temperature resistance, rapid speed-up, high thermal conductivity, which makes it widely apply for parking heater, heating element for central heating system, spark sensor, etc. Silicon Nitride Heater Features: High-temperature resistance Excellent thermal conductivity Rapid heating-up speed and high working temperature Good startup performance at low temperature, can be start-up at -30℃ Wide applications: high-speed diesel, high-temperature ignition device, ignition for oil medium, gas, burner, Preheater, etc. Application Mold heater Packaging Machinery Tobacco equipment Industrial equipment heating Burner ignition system Petrochemical industry Various high-temperature ignition devices
Read more

What makes the ceramic heating element the core part of a Vaporizer?

By -
Image
Source: https://www.innovacera.com/news/ceramic-heater-coil-for-vaporizer.html Not every dry herb vaporizers are the same! Especially those used ceramic heating element. The ceramic heating element is a safety and healthiest option for dry herb vaporizers, so every vaper is preferred to choose those vaporizers that carry ceramic heating element. The proponents believe that the heating element is the core of the vaporizer and primarily dictates the experience of the taste. Let's more specific, when a vaper burns tobacco, marijuana, or hemp during traditional smoking to release the active component, whatever it's nicotine, CBD, or THC, they inhale the smoke. We all know that's not good for health. Rather than burning, Vaporizer heats the liquid, wax or even dry herb to release a vapour, and a vaper inhales the vapour without any damage to their lungs or throat. And why the ceramic heating element is becoming the core part of the vaporizer? It's mainly because: 1. Ceramic ...
Read more

Machinable Aluminum Nitride BAN

By -
Image
BAN combines  Aluminum Nitride with Boron Nitride , a hybrid machinable Aluminum Nitride ceramic with excellent thermal conductivity, high strength, and resistance to thermal shock. Innovacera provides BAN, and it has very similar properties to SHAPAL material. SHAPAL is a trademark of Tokuyama Corporation.   These ceramics are used in various industries, including electronics, semiconductor manufacturing, aerospace, automotive and medical. BAN ceramics have properties that make them suitable for applications such as  heat sinks , heater substrates, semiconductor processing components, and optical equipment.   Material Advantages : High mechanical strength. High thermal conductivity. Low thermal expansion. Low dielectric loss. Excellent electrical insulation. High corrosion resistance–non-wetted by molten metals. Excellent Machinabilit–BAN can be machined to high-precision complex shapes. It has excellent sealing ability to vacuum and hasn’t given off much gas. High-...
Read more