How High Voltage Feedthroughs Enable Reliable Power Transmission in Excimer Laser Systems
In high-precision manufacturing fields such as semiconductor lithography, laser processing of display panels, and fiber Bragg grating writing, excimer lasers have become key equipment in numerous advanced manufacturing processes due to their deep ultraviolet wavelengths, high energy density, and precise processing capabilities. Excimer laser systems typically employ sealed discharge chambers, where laser output is generated by high-voltage pulse excitation of the working gas. During this process, external power must be reliably transmitted to internal electrodes within the chamber without compromising the chamber’s original vacuum-sealed environment. However, maintaining long-term reliable vacuum performance while achieving high-voltage electrical connections has always been a significant challenge in laser system design. High-voltage feedthroughs are critical components that address this issue, combining ceramic insulation structures with metal-to-gas-seal technology to s...