Why Do Vacuum Gauge Anode Assemblies Use Ceramic-to-Metal Structures? Insulation and Joining Design for High Vacuum
In systems such as vacuum coating, semiconductor equipment, vacuum furnaces, and scientific research instruments, vacuum gauges are used to monitor the pressure status inside the equipment. For some cold cathode vacuum gauges, the anode assembly is one of the important functional components inside, and its structural accuracy, insulation performance, and the connection quality between components will all affect the stability of the component’s operation. Unlike ordinary metal electrodes, the anode assemblies of vacuum gauges usually need to simultaneously meet requirements such as high-voltage conductivity, electrical insulation, precise positioning, adaptation to the vacuum environment, and reliable connection. Therefore, the combination of alumina ceramics and metal components has become a common structural solution for such components. The vacuum gauge anode assemblies currently provided by INNOVACERA adopt an alumina ceramic insulation structure, combined with a...