INNOVACERA | technical ceramic solutions

In the fields of semiconductor, optics, and high-precision electronic manufacturing, stable workpiece clamping and damage-free transfer have always been critical process steps. As process precision continues to improve, the limitations of traditional porous metal vacuum chucks in terms of uniformity, cleanliness, and long-term stability have become increasingly evident, driving the development and application of a new generation of ceramic-metal composite micro-porous vacuum chucks.   This type of vacuum suction cup typically uses high-performance microporous ceramic as the adsorption functional layer, integrated with a metal flange base structure in a unified design to achieve synergistic optimization of performance and structural strength.   01 The Key Role of Micro-porous Ceramic Adsorption Surface   On the adsorption end face, the product employs high-purity alumina (Al2O3) or silicon carbide (SiC) micro-porous ceramic materials, which are precisely sintered to form a...

  Porous ceramic chuck table  is a so important part in semiconductor equipment such as silicon wafer processing. Porous Ceramic Vacuum Chucks  are widely used as important components of equipment in silicon wafer, semiconductor compound wafer, piezoelectric ceramic, glass, LED, semiconductor package component substrate, optical component thinning, cutting and so on. The advantages include the following: Strong permeability: Uniform air permeability and water permeability to ensure the uniform stress and firm adsorption of the silicon wafer, so that it does not slip during the grinding process. Compact and uniform structure: Due to the dense and uniform  microporous ceramic , the chuck table is not easy to adsorb silicon powder abrasives and is easy to clean. High strength: No deformation during grinding, to ensure that the silicon wafer is uniformly stressed at all points during grinding, and is not easy to edge breakage and debris. Long service life: The surface sh...

Innovacera have two materials as Porous ceramics one is Aluminum Oxide and the other one is Silicon Carbide. For Aluminum oxide, the common pore size we make is 1um, 15um, 30um, 40um, 50um and 100um. Silicon carbide general pore size is 15um, 30um and 50um, both material porosity is 40%-50% . For other hole size and porosity, it can be customized as well with large quantity.   Between two, Aluminum oxide is more common used than silicon carbide as it is cost effective. But if you need to use under the max working temperature 800 degree-100degree, silicon carbide is only the one that available because Aluminum oxide with max 800 degree.   Here is the material data sheet for both: Alumina Porous ceramic properties: Material composition: Al2O3>=80%, SiO2 16%-18% Density: 2.3g/cm2-2.5g/m3 Hardness: >=50HRA Flexural Strength: >=  40MPa Compressive Strength: >=600 Porosity: 40% Pore Size: 1-2um, 5um, 15um, 30um, 40um, 50um, 100um and customized Max Working temperatu...

  Innovacera have two materials as Porous ceramics one is Aluminum Oxide and the other one is Silicon Carbide. For Aluminum oxide, the common pore size we make is 1um, 15um, 30um, 40um, 50um and 100um. Silicon carbide general pore size is 15um, 30um and 50um, both material porosity is 40%-50% . For other hole size and porosity, it can be customized as well with large quantity.   Between two, Aluminum oxide is more common used than silicon carbide as it is cost effective. But if you need to use under the max working temperature 800 degree-100degree, silicon carbide is only the one that available because Aluminum oxide with max 800 degree.   Here is the material data sheet for both: Alumina Porous ceramic properties: Material composition: Al2O3>=80%, SiO2 16%-18% Density: 2.3g/cm2-2.5g/m3 Hardness: >=50HRA Flexural Strength: >=  40MPa Compressive Strength: >=600 Porosity: 40% Pore Size: 1-2um, 5um, 15um, 30um, 40um, 50um, 100um and customized Max Working te...

  The dicing  vacuum chuck table can be made more than 12 inches, according to customer requirements with different shape like the disc, square and irregular shape. The size of thinning vacuum chuck can be matched with 3 inch wire, 4 inch wire, 5 inch wire, 6 inch wire, 8 inch wire and 12 inch wire. It can also be customized according to requirement. They are widely used for Disco, ADT, K&S, Applied materials, TSK, OKAMOTO, Micro Automation as special tools for adsorption and carrying. The main feature includes: High flatness and parallelism Good permeability and uniform adsorption High strength Long life time Easy to process

Innovacera have more than 7 years experience in producing  porous ceramic  part for vacuum chuck, filters, air bearings for semiconductor and pharmaceutical industry. The range of Innovacera porous ceramic filters is made from aluminum oxide and silicon carbide. The strong, uniform porous ceramic has 40-50% open porosity with a tortuous pore structure and is available in pore sizes ranging from 1 to 100 microns. Monolithic, single grade, aluminum oxide porous ceramic is available in 6, 15, 30, 50, 60, and 100 microns pore sizes. The porous ceramic disc processing is not the same as other ceramics, such as alumina ceramic, zirconia ceramics because of its properties of pores, so when you process the porous ceramics disc, here are 4 points you need to pay attention to: Put the porous ceramic plate into the water for five minutes. Ensure the porous plate be full of water to avoid oil contamination permeate into pores. Cut the plate with the blade only, and then grind it with a gr...