Aluminum nitride (AlN) Substrates

Innovacera’s Aluminum Nitride (AlN) Substrates deliver exceptional thermal conductivity, a thermal expansion coefficient closely matched to silicon, and excellent electrical insulation, making them an ideal choice for high-power electronic applications. With superior mechanical strength, high breakdown voltage, and outstanding thermal shock resistance, AlN substrates ensure reliable performance in demanding environments. Their precision machining capability and customizable specifications make them well-suited for IGBT power modules, high-power LEDs, and advanced heat dissipation components. 

Features

• High thermal conductivity
• Thermal expansion coefficient close to silicon wafer
• High breakdown voltage

Application

• High power IGBT power module
• High-power LED
• High power heat sink

Material Properties Table

Project		Test conditions	Unit	AlN
				AN-170	AN-200	AN-230
Material		–	–	AlN	AlN	AlN
Appearance		–	–	Light blue	beige	beige
Surface roughness		Ra	μm	0.2~0.75	0.2~0.75	0.2~0.75
Density		–	g/cm 3	≥3.3
Physical properties	Bending strength	3 -point bending resistance	MPa	≥400	≥350	≥300
	Vickers hardness	Load 4.9	GPa	≥10
	Water absorption	–	%	–
Thermal performance	Thermal conductivity	25℃	W/(m·k)	≥170	≥200	≥230
	Linear thermal expansion coefficient	25-500℃	x10 -6 mm/℃	4~6
	Thermal shock resistance	800℃	Time	≥10
	Specific heat	–	J/(kg·K)	720
Electrical properties	Dielectric constant	1MHz/25℃	–	8~9
	Dielectric loss	1MHz/25℃	x10 -4	≤3
	Volume resistivity	25℃	Ω·cm	> 10 14
	Breakdown voltage	–	kV/mm	> 17
Light performance	Reflectivity	Reflectivity meter	–	–
	Whiteness	Whiteness meter	–	–

Specifications and Dimensions

Size(mm) Thickness ( mm )	0.25	0.38	0.5	0.635	0.76	1.0	1.2	1.5	2.0
101.6*101.6	√	√	√	√	√	√	√	√	√
114.3*114.3	√	√	√	√	√	√	√	√	√
120*120	√	√	√	√	√	√	√	√	√
138*190			√	√	√	√	√	√	√

 

Processing

• Laser processing

• Grinding and polishing sheet roughness table

Project		Qualified		Special Grade
Internal dimension tolerance		±0.05mm		±0.03mm
External dimension tolerance		±0.15mm		±0.1mm
Hole tolerance (φ0.07-0.15mm)		±0.05mm		±0.02mm
Hole tolerance (φ ＞ 0.15mm)		±0.1mm		±0.02mm
Project	Surface roughness (μm )
	Qualified		Special Grade
Grinding	0.3-0.6		0.3-0.5
Fine grinding	0.1-0.4		0.1-0.3
Polishing	≤0.1		≤0.05