INNOVACERA | technical ceramic solutions

  As an advanced semiconductor manufacturing equipment, ion implanters have very high requirements for the performance of materials. As an important component, ceramic accessories play a vital role in ion implanters. A.Basic characteristics of ion implanter accessories and ceramic accessories Ion implanter accessories are mainly made of high-purity silicon nitride,  silicon carbide (SiC) , alumina, alumina/silicon carbide microporous ceramics,  aluminum nitride (AIN) ,  sapphire  and other ceramic materials, with the following characteristics: 1. High hardness and high strength: Ceramic fittings have high hardness and strength, which can withstand high load and wear during ion implantation.   2. High thermal stability: Ceramic fittings have a high melting point and can maintain stable performance in high temperature environments.   3. Good chemical stability: Ceramic accessories have good chemical stability and can work stably for a long time in harsh ...

Vacuum chucks are used in the thinning, dicing, cleaning, handling, and other processes of semiconductor electronic chips, like wafers. Why choose microporous ceramic vacuum chucks? 1. During the polishing and cleaning process of wafers, polishing liquid and water mist enter the working table, causing corrosion. And the microporous ceramic vacuum chucks resist corrosion. 2. The microporous ceramic vacuum chuck has no environmental pollution such as light, heat, and electromagnetic, unlike the rubber or other materials vacuum chuck. And the rubber or other materials vacuum chuck will be in direct contact with the surface of the item, so it is very easy to wear. Therefore, the porous ceramic has high temperature resistance and chemical corrosion resistance, light structure, and electrical insulation. So it is the best choice for vacuum chuck. 3. With its special porous structure, the microporous ceramic has very small holes and can be machined to very precise flatness. Combined with...