Advantages of ceramics used in ion implanters
As an advanced semiconductor manufacturing equipment, ion implanters have very high requirements for the performance of materials. As an important component, ceramic accessories play a vital role in ion implanters. A.Basic characteristics of ion implanter accessories and ceramic accessories Ion implanter accessories are mainly made of high-purity silicon nitride, silicon carbide (SiC) , alumina, alumina/silicon carbide microporous ceramics, aluminum nitride (AIN) , sapphire and other ceramic materials, with the following characteristics: 1. High hardness and high strength: Ceramic fittings have high hardness and strength, which can withstand high load and wear during ion implantation. 2. High thermal stability: Ceramic fittings have a high melting point and can maintain stable performance in high temperature environments. 3. Good chemical stability: Ceramic accessories have good chemical stability and can work stably for a long time in harsh ...