Semiconductor Wafer Carrier Alumina Disk and Ceramic Edge Ring
Semiconductor Wafer Carrier Alumina Disk and Ceramic Edge Ring High precision ceramic components improve yield management for semiconductor wafer processing. Innovacera ceramic components provide precise dimensional stability, ultra-flatness and smoothness, and vacuum holding of wafers during inspection and processing. Low-surface-contact configurations minimize risk of back-side particles negatively affecting wafer geometry for precision applications. The main features of high precision ceramic parts: 1. Wear and abrasion resistance: Alumina is a tough technical ceramic with very good wear resistance. 2. High precision dimensions with tightening tolerance, it easier to get a perfect fitting relationship. 3. Chemical inertness, resistant to most of the strong acids and alkalis. 4. High-temperature ability: withstand up to 1600°C in oxidizing and reducing atmospheres. 5. Great mechanical properties, hardness, compressive, and flexural strength are much higher in...