Vacuum Electrical Power Feedthroughs for High-Performance Vacuum Applications

In a vacuum environment, the pivotal conduit for secure energy transmission.

 Vacuum electrical power feedthrough is a key through component specially designed for vacuum systems. Its core function is to safely and reliably transfer electrical energy from the atmospheric environment to the vacuum interior while absolutely maintaining the vacuum seal of the cavity. It is the indispensable “energy link” that connects the external power source with the internal load of the cavity.

 

This component has solved the core problem of stable power supply under high vacuum conditions, and is the foundation for the reliable operation of various heating, high-voltage, and particle beam processes.

 

 

Design core: Sealing, insulation and current carrying capacity

 

The design of vacuum electrical power feedthrough is centered around three core aspects: sealing, insulation, and current-carrying capacity.

 

(1) Based on the mature ceramic-metal brazing technology, an atomic-level airtight connection is achieved, meeting the requirements of high vacuum and ultra-high vacuum applications. It also exhibits long-term stability under high-temperature baking and harsh working conditions.

 

(2) Robust mechanical and electrical structure: 304/316L stainless steel flanges, compatible with CF, KF, and ISO standard interfaces; conductors made of oxygen-free copper, copper-nickel alloy, or Kovar alloy, optionally gold or nickel plated to reduce contact resistance. High-purity aluminum oxide ceramic provides reliable insulation and thermal stability.

 

(3) Flexible electrical performance configuration: It supports configurations ranging from single conductors and dual conductors to multi-conductor arrays, meeting the requirements for single-channel or multi-channel independent power transmission. Depending on the application, it can be classified as high current type, high voltage type or composite power type. It can not only transmit hundreds of amperes of high current, but also withstand tens of thousands of volts of high voltage, providing reliable power support for complex vacuum processes.

 

 

Core product advantages:

 

–Absolutely reliable airtight guarantee: Permanent metalization sealing effectively eliminates the risk of air leakage, ensuring the lifespan and process purity of the vacuum system.

 

–Extensive parameter coverage: Voltage, current, the number of conductors, flange type, and installation dimensions can all be highly customized to precisely match the customer’s system blueprint.

 

–Tolerance to extreme environments: The working temperature range is wide, it is resistant to particle irradiation, and can adapt to plasma and corrosive atmospheres.

 

–Standardized and convenient integration: Compliant with international vacuum flange standards, it can be installed immediately upon arrival, significantly shortening the equipment design and installation cycle.

 

–Durable and stable performance: Composed entirely of inorganic materials, it has no aging phenomenon and an extremely low gas emission rate, ensuring that the equipment can operate without maintenance throughout its lifecycle.

 

Typical application scenarios:

 

Vacuum evaporation coating (PVD/CVD) equipment: Safety connection of the heating power supply or anode-cathode power supply.

 

Vacuum furnace and heat treatment system: Supply power to the heating elements or control module inside the cavity.

 

Electron beam and ion beam equipment: High-voltage power is supplied to the interior of the chamber for particle acceleration or deposition processes.

 

Vacuum testing and analysis equipment: Such as SEM (Scanning Electron Microscope) and mass spectrometers, which achieve multi-channel electrical connections.

 

Vacuum electrical power feedthrough is a comprehensive product that integrates ultra-high vacuum technology, materials science, precise brazing techniques and high-voltage insulation design. Its performance directly determines the processing capability, reliability and safety of the vacuum equipment. A reliable feedthrough is the stable “energy core” of a vacuum system.

 

Innovacera is committed to providing comprehensive support, from standard feedthrough products to fully customized solutions, safeguarding your innovative research and development and large-scale production.