BN Ceramics for PVD ALD and CVD Systems
Talking about the deposition techniques we have to mention Physical Vapor Deposition (PVD), Atomic Layer Deposition ( ALD) and Chemical Vapor Deposition (CVD) , which are fundamental in manufacturing high-precision components for semiconductors, electronics, aerospace industries even more. The versatility and properties of Boron Nitride (BN) ceramics make them become crucial components in PVD, ALD and CVD systems. Here I like to talk about the role of BN ceramics in these systems. Boron Nitride ceramics are composed of boron and nitrogen atoms arranged in a lattice structure. They can exist in hexagonal (HBN), which is the most commonly used form due to its similarity to graphite, making it an excellent lubricant and insulator. Cubic BN, on the other hand, is known for its hardness, approaching that of diamond. BN Ceramics in PVD Systems PVD systems are used to deposit thin films through the physical vaporization of material. BN ceramics p...