Applications of precision ceramics in front-end semiconductors
Semiconductor equipment requires a large number of precision ceramic components . Because of the advantages of high hardness, high elastic modulus, high wear resistance, high insulation, corrosion resistance and low expansion, it can be used as parts of silicon wafer polishing machine, epitaxy/oxidation/diffusion heat treatment equipment, photolithography machine, deposition equipment, semiconductor etching equipment, ion implanter and so on. Semiconductor ceramics are alumina, silicon nitride, aluminum nitride, silicon carbide, boron nitride, and so on, in semiconductor equipment, the value of precision ceramics about 16% . 1. Alumina (Al2O3) Alumina (Al2O3) is the most widely used ceramic material in semiconductor equipment. It has the advantages of stable material structure, high mechanical strength, high hardness, high melting point, corrosion resistance, good chemical stability, high resistivity, and good electrical insulation. In semiconductor etching equipment, high...