INNOVACERA | technical ceramic solutions

  Talking about the deposition techniques we have to mention Physical Vapor Deposition (PVD), Atomic Layer Deposition ( ALD) and Chemical Vapor Deposition (CVD) , which are fundamental in manufacturing high-precision components for semiconductors, electronics, aerospace industries even more. The versatility and properties of   Boron Nitride (BN)   ceramics make them become crucial components in PVD, ALD and CVD systems. Here I like to talk about the role of BN ceramics in these systems.     Boron Nitride ceramics  are composed of boron and nitrogen atoms arranged in a lattice structure. They can exist in hexagonal (HBN), which is the most commonly used form due to its similarity to graphite, making it an excellent lubricant and insulator. Cubic BN, on the other hand, is known for its hardness, approaching that of diamond.   BN Ceramics in PVD Systems PVD systems are used to deposit thin films through the physical vaporization of material. BN ceramics p...

Source: https://www.innovacera.com/news/bn-insulators.html With properties of high dielectric strength and high chemical inertness, Boron Nitride is uniquely qualified for a variety of shielding and insulating components in a harsh and high-temperature environment, such as PVD, CVD and plasma. Boron Nitride parts such as insulating rails, protective tubes, target frames, shields and liners ensure that the PVD arc remains constrained towards the target, preventing equipment damage. Boron Nitride is commonly used as an alternative for pyrolytic Boron Nitride in these applications.