China Advances in Domestic Production of Ceramic Heaters for Semiconductor Industry
As China pushes for self-sufficiency in semiconductor technology, domestic manufacturers are striving to produce advanced ceramic heaters. Ceramic heaters are critical components in chip-making equipment. They ensure precise temperature control during key semiconductor manufacturing processes, making them indispensable in modern fabs. Why Ceramic Heaters Matter in Semiconductor Manufacturing? In semiconductor production, wafers undergo processes such as thin-film deposition (CVD, PECVD, ALD) and etching, which require extremely precise and uniform heating. Traditional metal heaters face limitations at high temperatures (above 500 ° C) due to thermal expansion and risks of particle contamination. Performance Comparison: Aluminum Nitride (AlN) Heaters vs. Aluminum Heaters No Item Al Heater AIN Heater 1 Operation Temp R.T ~ 450 ° C (Max) R.T~800℃ 2 Melting Point 660.25℃ 1800 ° C (Sintering Temp.) 3 Thermal Conduct...