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Why Ceramic-to-Metal Sealing Components Are Critical for High Vacuum Coating Equipment

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As industries such as semiconductor thin-film deposition, precision optical coating, and functional coatings continue to advance toward higher precision and reliability, the demands on equipment—including PVD, CVD, vacuum evaporation, and plasma processing—have steadily increased regarding chamber vacuum stability, electrical insulation performance, and long-term component reliability.   During operation, vacuum coating equipment demands a long-term stable vacuum environment, as well as reliable transmission of external power and signals into the chamber. Nevertheless, under high-temperature, RF, high-voltage and plasma working conditions, conventional connection structures are prone to degraded insulation performance, material outgassing, insufficient sealing reliability and thermal cycling failure.   Ceramic-to-metal sealing components combine the excellent insulation and low outgassing properties of high-purity ceramics with the superior electrical conductivity and mechani...
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Boron Nitride Ceramic: Is It a Thermal Insulator or a Thermal Conductor?

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High-temperature manufacturing, semiconductor tools, vacuum thermal treatment and precision electronics all rely heavily on materials with reliable thermal performance, which directly determines equipment stability, temperature consistency and processing yield. A frequent dilemma engineers encounter when choosing boron nitride (BN) ceramics is whether BN acts as an insulator or thermal conductor.   This cannot be answered with a simplistic yes-or-no.   Boron nitride ceramics are capable of both transferring and blocking heat along designated axes. Their practical thermal properties are governed by material grade, crystal orientation, part geometry, heat flow paths and assembly configuration.   Hexagonal boron nitride (h-BN), fabricated by hot pressing or sintering, and chemical vapor deposited pyrolytic boron nitride (PBN) are the two mainstream grades for industrial high-temperature thermal control scenarios. Both display prominent thermal anisotropy. The core strength ...
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