Ceramic Packaging for Micro Electro Mechanical Systems (MEMS): Solutions for Harsh Environments
Unlike single-function devices made by traditional manufacturing techniques, Micro Electro Mechanical Systems (MEMS) is a micro-sized controllable electromechanical device system that integrates micro-mechanical structures, sensors, actuators, and electronic components. This type of product has numerous advantages, including small size, light weight, low cost, low power consumption, high reliability, mass producibility, easy integration, and intelligent implementation. This also means that encapsulation not only needs to protect the internal microelectronic components from external impurities, but also provides a stable and controllable physical environment for the internal structure. Different types of MEMS products all have their own unique manufacturing processes and specific packaging forms. Ceramic packages , due to its excellent airtightness, outstanding thermal-mechanical properties, insulation, and thermal stability, generally offers better comprehensive performanc...